Undergraduate Courses 2022-23

For UG students only. The course is intended to provide students with fundamental knowledge in device and integrated circuits (IC's) fabrication. The class covers the modules of device fabrication (including clean room concept, cleaning procedures, diffusion, lithography, wet processing, dry etching, chemical vapor deposition, sputtering) and process integration to form IC's. The lab section will bring the students with hands-on experience in IC fabrication facilities in Nanoelectronics Fabrication Facility of HKUST.